FIB Edit Activities

Definitions :

FIB : Focused Ion Beam
GDS : (Graphic Database System) Files used in the FIB equipment to navigate to a specific area in the integreted circuit
Circuit Edit : Technique used in new design flow modifications on integreted circuit; This technique can be applied to design optimization changes before final productionin, debugging process or solutions fixes

Serma header


	*SERMA Main Strength* Fast turn around (standard within 3 Days) Day night shift Risk assessment Optimization and checking of modification Work on site possibility (Open Laboratory) Data and sample security (pgp, safety box…) Pre and post FIB support (sample prep, electrical characterization).

*Systems Strengths ?* Modification down to 28nm nodes Frontside and backside Edit Package, PCB and wafer up to 8’’ Type of interconnection (Cu, Al) 0,5kV to 30kV beam energy 1pA to 21nA current range IR camera		*Chemistries available ?* Tungsten deposition (2 Ohms/o) Oxide deposition (TEOS, TMCTS) XeF2 (Dielectric & Si trenching) I2 & Cl2 (Aluminum) Water (Copper & Organics) Dx (Copper, Deprocessing) DE (Low-k dielectric)

*How ?* Metal lines cut Metal lines rerouting Selective etching for metal or dielectric Conductive and dielectric deposition Probe pads deposition Cross-sectionning Organics removal		*Main uses ?* Prototyping Mask & IC modification Problem solving Failure analysis Reverse engineering
Circuit-Edit examples

	Using GDS files for navigation

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